Modeling MEMS and NEMS 1st Edition by John A Pelesko ,David H Bernstein ISBN 1584883065 978-1584883067

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Product details: 

ISBN 10:1584883065

ISBN 13:978-1584883067

Author:John A.Pelesko ,David H.Bernstein

Designing small structures necessitates an a priori understanding of various device behaviors. The way to gain such understanding is to construct, analyze, and interpret the proper mathematical model. Through such models, Modeling MEMS and NEMS illuminates microscale and nanoscale phenomena, thereby facilitating the design and optimization of micro- and nanoscale devices. After some introductory material, a review of continuum mechanics, and a study of scaling, the book is organized around phenomena. Each chapter addresses a sequence of real devices that share a common feature. The authors abstract that feature from the devices and present the mathematical tools needed to model it. They construct, analyze, and interpret a series of models of increasing complexity, then at the end of the chapter, they return to one of the devices described, apply the model to it, and interpret the analysis. In the beginning, the world of microdevices was dominated by experimental work and the development of fabrication techniques. As it matures, optimization and innovative designs are moving to the forefront. Modeling MEMS and NEMS not only provides the practical background and tools needed to design and optimize microdevices but it also helps develop the intuitive understanding that can lead to developing new and better designs and devices.

Table of contents: 

1. INTRODUCTION
2. MEMS and NEMS
3. A Capsule History of MEMS and NEMS
4. Dimensional Analysis and Scaling
5. Exercises
6. A REFRESHER ON CONTINUUM MECHANICS
7. Introduction
8. The Continuum Hypothesis
9. Heat Conduction
10. Elasticity
11. Linear Thermoelasticity
12. Fluid Dynamics
13. Electromagnetism
14. Numerical Methods for Continuum Mechanics
15. SMALL IS DIFFERENT
16. The Backyard
17. Scaling
18. Systems
19. Exercises
20. THERMALLY DRIVEN SYSTEMS
21. Introduction
22. Thermally Driven Devices
23. From PDE to ODE: Lumped Models
24. Joule Heating of a Cylinder
25. Analysis of Thermal Data Storage
26. Exercises
27. MODELING ELASTIC STRUCTURES
28. Introduction
29. Examples of Elastic Structures in MEMS/NEMS
30. The Mass on a Spring
31. Membranes
32. Beams
33. Plates
34. The Capacitive Pressure Sensor
35. Exercises
36. MODELING COUPLED THERMAL-ELASTIC SYSTEMS
37. Introduction
38. Devices and Phenomena in Thermal-Elastic Systems
39. Modeling Thermopneumatic Systems
40. The Thermoelastic Rod Revisited
41. Modeling Thermoelastic V-Beam Actuators
42. Modeling Thermal Bimorph Actuators
43. Modeling Bimetallic Thermal Actuators
44. Exercises
45. MODELING ELECTROSTATIC-ELASTIC SYSTEMS
46. Introduction
47. Devices Using Electrostatic Actuation
48. The Mass-Spring Model
49. Modeling General Electrostatic-Elastic Systems
50. Electrostatic-Elastic Systems – Membrane Theory
51. Electrostatic-Elastic Systems – Beam and Plate Theory
52. Analysis of Capacitive Control Schemes
53. Exercises
54. MODELING MAGNETICALLY ACTUATED SYSTEMS
55. Introduction
56. Magnetically Driven Devices
57. Mass-Spring Models
58. A Simple Membrane Micropump Model
59. A Small-Aspect Ratio Model
60. Exercises
61. MICROFLUIDICS
62. Introduction
63. Microfluidic Devices
64. More Fluidic Scaling
65. Modeling Squeeze Film DampingExercises
66. BEYOND CONTINUUM THEORY
67. Introduction
68. Limits of Contiuum Mechanics
69. Devices and Systems Beyond Continuum Theory
70. Exercises
71. REFERENCES
72. APPENDICES
73. Mathematical Results
74. Physical Constants

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Tags: John A Pelesko, David H Bernstein, Modeling, MEMS