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Handbook of Thin Film Deposition Processes and Techniques Principles Methods Equipment and Applications 2nd Edition by Klaus K Schuegraf, Krishna Seshan ISBN 0815517785 9780815517788

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Handbook of Thin Film Deposition Processes and Techniques Principles Methods Equipment and Applications 2nd ed Edition Klaus K Schuegraf Digital Instant Download

Author(s): Klaus K Schuegraf; Krishna Seshan
ISBN(s): 9780815517788, 0815517785
Edition: 2nd ed
File Details: PDF, 8.20 MB
Year: 2001
Language: english
SKU: EB-4102344 Category: Tags: ,

Handbook of Thin Film Deposition Processes and Techniques Principles Methods Equipment and Applications 2nd Edition by Klaus K Schuegraf, Krishna Seshan – Ebook PDF Instant Download/Delivery: 0815517785, 9780815517788
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ISBN 10: 0815517785 
ISBN 13: 9780815517788
Author: Klaus K Schuegraf, Krishna Seshan

The Handbook of Thin Film Deposition Techniques: Principles, Methods, Equipment and Applications, Second Edition explores the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization over the last 20 years. This growth has been fueled in large part by improved thin film deposition tec

Handbook of Thin Film Deposition Processes and Techniques Principles Methods Equipment and Applications 2nd Table of contents:

1    Deposition Technologies and Applications: Introduction and Overview
2   Silicon Epitaxy by Chemical Vapor Deposition
3   Chemical Vapor Deposition of Silicon Dioxide Films
4   Metal Organic Chemical Vapor Deposition: Technology and Equipment
5 Feature Scale Modeling.
6   The Role Of Metrology And Inspection In Semiconductor Processing.
7   Contamination Control, Defect Detection, and Yield Enhancement in Gigabit Manufacturing
8 Sputtering and Sputter Deposition
9 Laser and Electron Beam Assisted Processing
1 0Molecular Beam Epitaxy: Equipment and Practice
11  Ion Beam Deposition
12  Chemical Mechanical Polishing
13 Organic Dielectrics in Multilevel Metallization of Integrated Circuits

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Tags: Klaus K Schuegraf, Krishna Seshan, Film Deposition, Techniques Principles