Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 1st Edition Henry Baltes

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Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 1st Edition Henry Baltes Digital Instant Download

Author(s): Henry Baltes, Oliver Brand, Gary K. Fedder, Christofer Hierold, Jan G. Korvink, Osamu Tabata
ISBN(s): 9783527616923, 3527616926
Edition: 1
File Details: PDF, 8.44 MB
Year: 2004
Language: english